Published: 2025-06-06 Last Updated: 2025-06-10
According to a May 2025 report by Precedence Research, the global market for semiconductor wet process chemicals reached approximately USD 14.9 billion in 2024. Further analysis from Maximize Market Research and TECHCET indicates that the market is expected to grow at a compound annual growth rate (CAGR) of 6–7%, driven by the increasing complexity of advanced nodes and continued investment in new wafer fabs.
As demand rises for precise, stable, and contamination-free chemical delivery, semiconductor fabs are placing greater pressure on system integrators to adopt pump solutions that are low-noise, remotely monitorable, and compact—ensuring uninterrupted 24/7 operation while maintaining cleanroom compliance.
📌 Tackling Key Challenges in Semiconductor Chemical Delivery: Noise, Air, Space, and Remote Control
Customer Case Study – LTCAM, Semiconductor Chemical Delivery System Integrator
Site Overview
LTCAM is a specialized system integrator focused on semiconductor chemical delivery systems. At this facility’s cleanroom chemical supply area, various high-purity chemical fluids must be continuously delivered through pipelines—including wafer cleaning agents, etchants, CMP slurries, and electroplating solutions. These fluids are highly corrosive, with varying viscosities and specific gravities, and must be supplied around the clock in a sealed pipeline network with stable flow rates to meet process requirements.
Improvement Goals
- 1. Reduce operational noise
- 2. Avoid increasing system footprint
- 3. Eliminate compressed air piping to reduce energy use and maintenance
- 4. Integrate pumps with PLC for automated monitoring
- 5. Replacement pump must support dry-run and self-priming functions
💡 Solving the Top 5 Issues in Chemical Delivery with the QUANTM Electric Pump
In this case, a 1-inch air-operated diaphragm pump was replaced with the GRACO QUANTM i30 electric double diaphragm pump.
The electric motor eliminates the need for compressed air, reducing noise while cutting energy and maintenance costs.
Its compact size fits the original frame with no extra footprint. Core features like self-priming and dry-run capability are preserved, ensuring safe shutdown, drainage, and CIP operations.
With a built-in Modbus-RTU interface, the pump connects directly to the PLC, enabling real-time monitoring and seamless automation.
🔧 How the Electric Diaphragm Pump Meets Customer Demands
Key Highlights of the QUANTM i30 Electric Diaphragm Pump
🔇 Noise Reduced to 61 dB(A)
Noise dropped from 75 dB to 61 dB on-site. No need for hearing protection. Vibration < 0.3 mm/s—ideal for integration with process tools.
📦 Zero Footprint Expansion
Pump measures just 250 × 310 mm—42% smaller than the previous model. Easily installs within the existing frame with fewer dead corners for easier cleaning.
⚡ 30 MWh Energy Saved Annually
By eliminating compressed air, 16 pumps combined save ~30 MWh per year and reduce air system maintenance costs.
📡 Real-Time Digital Monitoring
Built-in I/O terminals connect to PLC; Modbus-RTU support enables real-time flow, pressure, and load feedback to SCADA systems.
💧 Self-Priming & Dry-Run Capable
Self-primes up to 6 meters; restart without priming. Safe to run dry for up to 30 minutes—ideal for CIP and system drain processes.
📊 Proven Results: 71% Energy Savings and 14 dB Noise Reduction
¹ Estimated using average U.S. industrial electricity rate of $0.13 USD/kWh and typical air compressor efficiency of 0.25 kW/(m³/min). Actual savings may vary depending on specific system conditions.
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